SIGLO-2D is a 2-D fluid model of glow discharges in cylindrical geometries.
It can be used for the simulation of RF, DC or TRansient glow discharges in conditions
typical of plasma processing situations or other applications of low temperature plasmas.
The user enters interactively the configuration of the electrodes, dielectric and reactor
walls.
The output from this code includes current and voltage waveforms, power deposition
profiles, mean energy, ionization rates, electron and ion densities and electric field
distribution between the electrodes. Graphical displays including on-line movies of the
main variables are available by choosing from menus with options for hard copy output.
A very robust and efficient numerical algorithm is used. Athough the computation time
may be on the order of 10 hours on a PC Pentium 90 for the complete simulation of an RF
discharge, this tool is nevertheless suitable for parametric studies and for predicting
the influence of the reactor geometry on etching or deposition uniformity.
SIGLO-2D comes with a data base including electron and ion transport coefficients and
rate data in 15 gases. A user friendly Boltzmann code is
also provided with SIGLO-2D so that the user can calculate the electron transport and rate
coefficients in gas mixtures (a set of electron-molecule cross sections is also provided
for the 15 gases) and in a format directly useable in any of the codes in the SIGLO
series.
A version of SIGLO-RF, the user-friendly code for the
simulation of 1D RF glow discharges is also provided with SIGLO-2D.
