RF Discharge Simulation (2D)

Results obtained with SIGLO-2D

Below is an example of simulation of a RF discharge in Hydrogen at 13.56 MHz, for a reactor geometry similar to the GEC reference cell. The movie shows the time evolution of the spatial distribution of the electron number density (color contour; light blue is 0, and red is maximum electron number density ~10⁹ cm^-3 ) in a reactor. The RF voltage is applied on the left electrode. The RF electrode is surrounded by a guard ring at the anode potential. The anode and walls are grounded.

It is interesting to note that the plasma density presents a maximum off axis which forms a ring between the electrodes. The oscillation of the sheath, associated with electron motion anf flow to the electrodes, appears clearly on this movie.

Space and time variations of the electron density in a RF discharge in H₂

These results has been generated using the software SIGLO-2D from the SIGLO Series developed by Kinema Software

Reference:

J.P. Boeuf, A. Merad, "Fluid and Hybrid Models of non equilibrium discharges", in Plasma Processing of Semiconductors, NATO ASI Series E: Applied Sciences - Vol. 336, Ed. P.F. Williams, (Kluwer Academic Publisher 1997) pp. 291-320

J. P. Boeuf and L. C. Pitchford, Two-dimensional model of a capacitively coupled rf discharges and comparisons with experiments in the Gaseous Electronics Conference reference reactor", Phys Rev E 51, 1376 (1995).

J.P. Boeuf, P. Belenguer and T. Hbid, "Plasma Particles Interactions", Plasma Sources Sci. and Technol., Special Issue on "Formation, Transport and Consequences of Particles in Plasmas" (NATO ARW), 3, 407 (1994).